IXION 193 SLM

The IXION-193-SLM is a single-frequency all-solid-state laser system for applications such as optical metrology, calibration of 193 nm stepper optics or bandwidth control of high power ArF excimer lasers. With a coherence length of more than 2 meters, it is best suited for interferometric applications. It is well established in the supply chains of the semiconductor industry.
The center wavelength of the system is customizable in a range between 190 and 195 nm and can be pre-configured to a fixed wavelength at the time of purchase. As a standard it matches the typical wavelength used by ArF excimer lasers 193.368 nm.
As an option, a high precision wavemeter with an absolute spectral accuracy <0.4 pm can be integrated into the system. This ensures highest process control and adds more comfort for spectral tuning of the laser.

Starting from 2026, the system can be ordered in three alternative configurations: standard, high power (50 mW) and long coherence length.