XVL-5HG
Applications
- Direct mask repair
- Micro material processing <1µm
- Rapid prototyping
- Wavelength sensitive processes
Features
- Diode laser pumped
- Sealed housing
- Motorized 5HG displacement
- Slot laser diode modul
- Excellent beam profile
- RS-232 interface
- Thermo-electrical heat management
| modell | XVL-5HG |
| wavelength | 213 nm |
| average power | 100 mW |
| pulse duration | < 7 ns |
| energy per pulse | 10 µJ |
| repetition rate | 0.1-30 kHz |
| M² | < 1.6 |
Datenblatt
Last update: 04/16/07