IXION 193 SLM

The IXION 193 SLM is a single frequency all-solid-state laser system for applications such as optical metrology, calibration of 193 nm stepper optics or bandwidth control of high power ArF excimer lasers. The spectral bandwidth is near its theoretical Fourier limit.

The center wavelength of the system is customizable in a range between 185 and 194 nm and can be configured for a fixed wavelength at the time of order.

As an additional option, a high precision spectrometer with an absolute spectral accuracy of 0.001 nm can be integrated into the system. This enables maximum precision for the control of the spectral tuning of the laser.